Silicon-Based Micro-Pump With No-Moving-Part Valves
University of Washington, Seattle, U.S.A.
Dept of
Mechanical Engineering:
Fred K. Forster,
Ron L. Bardell,
Robert J. Penney
Dept of
Electrical Engineering:
Marty A. Afromowitz,
Nigel R. Sharma
Sponser:
Defense Advanced Research Projects Agency.
This page last updated Jan. 5th 1998 - NRS