Micro-Pumps With No-Moving-Part Valves
University of Washington, Seattle, U.S.A.

Dept of Mechanical Engineering: Fred K. Forster, Ron L. Bardell, Nigel R. Sharma,
Robert J. Penney*, Chris Morris, Ling-Sheng Jang, Andrew Kiehl
Dept of Electrical Engineering: Marty A. Afromowitz, Shuliang Li
Sponser: Defense Advanced Research Projects Agency.

* Former group members.


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back to prev. home to main poster link to next We have been conducting research in micro-pumping technology primarily devoted to the development of pumps that operate in the 10 to 1600 micro-liter per minute flow rate range. We have been particularly interested in reciprocating pumps based on inlet and outlet valves that have no moving parts. Such valves have a number of advantages given their small dimensions. These valves do not require gaskets, hinges or sealing surfaces. In addition, these valves may be ideal for pumping fluids that contain biological material such as living cells or non-organic particulates that might interfere with valves that require closure to work properly. You can step through the poster presentation or you can click on the poster itself for more information on fabrication and principles of operation.

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Simulation circuit performance data photo of etched chip plan view of chip piezo-electric disc is attached pyrex cover-slip is bonded on chips are cut from the wafer The wafer is etched mask and explanation of use cfd simulation of t-45 reverse flow abstract of poster abstract of poster