Micro-Pumps With No-Moving-Part Valves
University of Washington, Seattle, U.S.A.

Dept of Mechanical Engineering: Fred K. Forster, Ron L. Bardell, Nigel R. Sharma,
Robert J. Penney*, Chris Morris, Ling-Sheng Jang, Andrew Kiehl
Dept of Electrical Engineering: Marty A. Afromowitz, Shuliang Li
Sponser: Defense Advanced Research Projects Agency.

* Former group members.

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Bowing the Pyrex cover over the central pump chamber forces liquid to flow through the flow channels on either side. Due to their design these channels act like valves allowing more flow in one direction than in the other. This four element pump is designed for net flow from left to right. The smaller image is the approximate size of a pump chip.
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