Micro-Pumps With No-Moving-Part Valves
University of Washington, Seattle, U.S.A.

Dept of Mechanical Engineering: Fred K. Forster, Ron L. Bardell, Nigel R. Sharma,
Robert J. Penney*, Chris Morris, Ling-Sheng Jang, Andrew Kiehl
Dept of Electrical Engineering: Marty A. Afromowitz, Shuliang Li
Sponser: Defense Advanced Research Projects Agency.

* Former group members.

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The characteristics that best define pump performance are the flow rate and the pressure rise that the pump can deliver, also called pump head. Variations in pump design allow different performance characteristics. On this graph we see that pumps with stiffer membranes offer higher performance over pumps with flexible membranes (4.75 meters and 750 ul/minute versus 0.22 meters and 90 ul/minute). We have currently achieved maximum flow rates of up to 1600 ul/minute.
Performance Data
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