Poster: Micro-Pump With No-Moving-Part Valves

Micro-Pumps With No-Moving-Part Valves
University of Washington, Seattle, U.S.A.
Dept of Mechanical Engineering: Fred K. Forster, Ron L. Bardell, Nigel R. Sharma,
Robert J. Penney*, Chris Morris, Ling-Sheng Jang, Andrew Kiehl
Dept of Electrical Engineering: Marty A. Afromowitz, Shuliang Li
Sponser: Defense Advanced Research Projects Agency.

* Former group members.

After etching the silicon wafer is cut into separate devices using a diamond tipped saw. This results in individual silicon chips, each with a main pump chamber, valves, and inflow and outflow chambers.